| 摘要 |
PURPOSE:To improve the sensitivity of a semiconductor acceleration sensor and, at the same time, to reduce the sensitivity difference between axes by arranging more than one resistance elements at four locations along two axes intersecting each other at right angles at the center of an acting section and another axis passing nearly center of the two axes. CONSTITUTION:An acceleration sensor 1A is provided with new resistance elements R1', R1''-R4', and R4'' which are respectively formed near resistance elements R1-R4 (Rx1-Rx4, Ry1-Ry4, and Rz1-Rz4) on both sides of the elements R1-R4 in addition to the elements R1-R4. The new elements Rn' and Rn'' (n=1-4) have the same dimension as the elements Rn have and are respectively arranged on lines drawn at small angles from an X-, Y-, and inclined axes. Since two new resistance elements Rn' and Rn'' are formed at each of four locations along the S-, Y-, and inclined axes and three resistance elements (Rn, Rn', Rn'') are arranged at each location, the sensitivity of this acceleration sensor 1A is improved three-fold. |
