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发明名称
ETCHING CONTROL METHOD
摘要
申请公布号
JPH07193056(A)
申请公布日期
1995.07.28
申请号
JP19940158326
申请日期
1994.07.11
申请人
HITACHI LTD
发明人
MATSUBA IKUO;MATSUMOTO KUNIAKI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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