| 摘要 |
<p>PURPOSE:To suppress vibration and impulses being transmitted to wafers at the time of their transportation and storage, to prevent the generation of scratch es and dust and to raise the manufacturing yield by fixing the wafers with a built-in stopper of inexpensive structure provided in a wafer cassette body. CONSTITUTION:After a specified number of wafers are put in the wafer keeping spaces 3 of a wafer cassette, a stopper button 5 is operated and a stopper bar is slided to the side, and the peripheral parts of the wafers are held and fixed. After that, this wafer cassette is transported to a specified position or stored. On this occasion, the wafers are held and fixed by the wafer presses 8 of the stopper bar 6. Accordingly. the wafers do not move inside the wafer keeping spaces 3 in the midst of transportation and storage. In addition, vibration and impulses are not transmitted, and the generation of flaws and refuse can be prevented.</p> |
