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发明名称
Modulares Konzept einer Vakuumkammer für Beschichtungsanlagen
摘要
申请公布号
DE9404022(U1)
申请公布日期
1995.07.06
申请号
DE19940004022U
申请日期
1994.03.10
申请人
GATI, ANDREAS, 60323 FRANKFURT, DE
发明人
分类号
C23C14/56;(IPC1-7):C23C16/44
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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