SLIDER WITH COMPOSITE WELDED STUD AND MANUFACTURE

摘要

PURPOSE: To prevent the destruction of a stud during a welding operation by providing a composite welding stud in a slider and providing a base provided with a controlled height and a meltable stud member in the respective studs. CONSTITUTION: A thin conductive coating 32 is executed on the substrate 30 of an Si wafer to the like. A photosensitive film 34 is formed on it and an opening part 36 is formed at a prescribed position by the photolithography of the film 34. The conductive stud 38 of copper or the like by electrochemical growth is formed at the opening part 36 and the surface is ground and flattened. The stud member 42 of Sn-Pb or the like is formed on the base 40 by the electrochemical growth and the film 34 is etching removed. An auxiliary meltable stud member 44 provided on the lower surface of a spring arm 56 is positioned and welded on the stud 40-42, this slider 58 is held on a reference surface 60 and the arm 56 is held on a pedestal 62.