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发明名称
Nassätzverfahren und -zusammensetzung.
摘要
申请公布号
DE69109898(D1)
申请公布日期
1995.06.29
申请号
DE19916009898
申请日期
1991.03.07
申请人
AMOCO CORP., CHICAGO, ILL., US
发明人
FJARE, DOUGLAS ERIC, NAPERVILLE, ILLINOIS 60540, US;BEUHLER, ALLYSON JEANNE, DOWNERS GROVE, ILLINOIS 60512, US;NAVAR, CYNTHIA ANN, AURORA, ILLINOIS 60505, US
分类号
G03F7/40;C08J7/12;C09K13/00;H01L21/308;H01L21/311;(IPC1-7):C08J7/12
主分类号
G03F7/40
代理机构
代理人
主权项
地址
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