| 摘要 |
<p>An electropic metrology system uses Moire interferometry to generate contour information on the surface of an object. Interfering coherent beams generate an image on the object's surface that includes a stripe pattern. The surface is viewed with a high resolution camera and digitized using a frame grabber and computer. A reference pattern is generated in software and is mixed with the digitized object surface signals. The mixed signals are filtered to remove signals at the carrier frequency and signals containing the beat frequency indicative of the surface contours are output.</p> |
