发明名称 |
Method for fabrication of wavelength selective electro-optic grating for DFB/DBR lasers. |
摘要 |
<p>A method is described for the preparation of a DFB/DBR laser which includes an electro-optic grating formed by periodically modulating the index of refraction of the cladding employed. The method involves depositing a waveguide upon a semi-insulating or doped substrate and then depositing an active layer upon the resultant structure. The active layer is subsequently selectively etched and a cladding material deposited adjacent thereto and electrically isolated therefrom. The cladding is then selectively patterned with a conductive material by photolithographic techniques to yield a grating to periodically modulate the index of refraction.</p> |
申请公布号 |
EP0660469(A2) |
申请公布日期 |
1995.06.28 |
申请号 |
EP19940309007 |
申请日期 |
1994.12.05 |
申请人 |
AT&T CORP. |
发明人 |
CHIU, TIEN-HENG;WILLIAMS, MICHAEL D. |
分类号 |
H01S5/00;H01S5/042;H01S5/0625;H01S5/10;H01S5/12;H01S5/125;(IPC1-7):H01S3/085 |
主分类号 |
H01S5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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