| 摘要 |
PURPOSE:To realize a structure which can discharge developing solution in supply pipes and a nozzle easily, clean a development device for printed wiring board in a short period of time, and prevent deposition of developing solution component by providing a drain in the supply pipes. CONSTITUTION:A drain 6 is connected to upper and lower supply pipes 1, 2 in such a way that there is no projection section in the supply pipes. The place where the drain 6 is connected to the supply pipes is between one end where the supply pipes 1, 2 are blocked and a nozzle 5 which is closest to the end. The other end of the supply pipes 1, 2 is branched into three sections to form a developing solution supply pipe 7, an air supply pipe 8, and a water supply pipe 9. During development, valves 11, 12 are closed and only developing solution is flowed into the upper and lower supply pipes 1, 2 by means of a pump 13. At the time of cleaning, the drain 6 and the valve 11 are opened to drain all developing solution off by compressed air. Next, the valve 11 is closed and the valve 12 is opened to flow water into the upper and lower supply pipes 1, 2 for cleaning. Lastly, only the valve 11 is opened to discharge washing water out of a development device by compressed air. |
