| 摘要 |
<p>PURPOSE:To safely and efficiently treat a gaseous nitrogen trifluoride by using a mixture of solid metal fluoride with a metal as a harmful effect removing agent and specifying this metal content. CONSTITUTION:The mixture of the solid metal fluoride such as lithium fluoride, beryllium fluoride or aluminum fluoride which is powder-like and particulate as fine as possible with a metal such as aluminum or chromium is used. Moreover, the metal high in activity by being subjected to a reductive treatment is preferable. The mixing ratio of the metal to the solid metal fluoride is 1-99wt.% metal content, preferably 20-70wt.%. The harmful effect removing efficiency of gaseous NF3 is improved drastically and also powdering of a tablet being a cause of column plugging is prevented.</p> |
