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发明名称
TREATMENT WAFER TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
摘要
申请公布号
JPH07153749(A)
申请公布日期
1995.06.16
申请号
JP19930329883
申请日期
1993.11.30
申请人
OKI ELECTRIC IND CO LTD
发明人
KANAMORI JUN
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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