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发明名称
SURFACE TREATMENT DEVICE
摘要
申请公布号
JPH07153736(A)
申请公布日期
1995.06.16
申请号
JP19930329898
申请日期
1993.11.30
申请人
SONY CORP
发明人
OKAMOTO AKIRA
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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