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发明名称
SPIN-ON-GLASS COATING DEVICE AND COATING METHOD
摘要
申请公布号
JPH07153752(A)
申请公布日期
1995.06.16
申请号
JP19930329882
申请日期
1993.11.30
申请人
OKI ELECTRIC IND CO LTD
发明人
KANAMORI JUN
分类号
H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
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