GROWTH METHOD OF GAAS/ALGAAS THIN FILM,申请号JP19940202007-传众专利搜索

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发明名称	GROWTH METHOD OF GAAS/ALGAAS THIN FILM
摘要
申请公布号	JPH07147235(A)	申请公布日期	1995.06.06
申请号	JP19940202007	申请日期	1994.08.26
申请人	HIYAMIZU SUKEHISA;SHIMOMURA SATORU;KUBOTA CORP	发明人	HIYAMIZU SUKEHISA;SHIMOMURA SATORU;OKAMOTO YASUNORI
分类号	H01L21/205;H01L21/203;(IPC1-7):H01L21/203	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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