发明名称 POSITIVE RESIST COMPOSITION
摘要 <p>PURPOSE:To provide a positive resist composition free from the hindrance to the performance exhibited originally by a resist at the time of applying particularly for a color filter and easy in process control, etc., at the time of producing the color filter. CONSTITUTION:The positive resist composition contains a compound having at least one group selected from a family composed of sulfonamide, carboxylic acid amide and ureide, in each of which one hydrogen atom is substituted, a dissolution inhibitor and an organic solvent. Because the resist composition does not contain a matrix resin, in the case of using for the color filter, the color filter excellent in properties such as color density and color reproducibility ad thin in film thickness is obtained.</p>
申请公布号 JPH07140665(A) 申请公布日期 1995.06.02
申请号 JP19940065092 申请日期 1994.04.01
申请人 SUMITOMO CHEM CO LTD 发明人 HISHIRO YOSHIKI
分类号 G02B5/20;G03F7/00;G03F7/004;G03F7/028;G03F7/039;G03F7/105;H01L21/027;(IPC1-7):G03F7/039 主分类号 G02B5/20
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