DEPOSITION OF THIN FILM,申请号JP19930286407-传众专利搜索

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发明名称	DEPOSITION OF THIN FILM
摘要
申请公布号	JPH07142434(A)	申请公布日期	1995.06.02
申请号	JP19930286407	申请日期	1993.11.16
申请人	HITACHI LTD	发明人	YAMAMOTO KENICHI;NINOMIYA TAKESHI;HASEGAWA MASAKI
分类号	H01L21/302;H01L21/203;H01L21/304;H01L21/3065;(IPC1-7):H01L21/304;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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