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发明名称
Sub-zero temperature,RF etching system
摘要
申请公布号
GB9507832(D0)
申请公布日期
1995.05.31
申请号
GB19950007832
申请日期
1995.04.18
申请人
MISSING, PHILIP R
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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