| 摘要 |
A temperature controller to accurately control the temperature of a device under test (DUT) including a heat exchanger in heat exchange relationship with the DUT. A temperature sensor is received within the heat exchanger and is thermally isolated therefrom. This temperature sensor measures the temperature of the DUT. A second temperature sensor is received within the heat exchanger and measures the temperature of the heat exchanger. The temperature of the DUT is based on temperature readings from both of the sensors.
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