OPTICAL SEMICONDUCTOR DEVICE

摘要

An optical semiconductor device comprises a stripe-mesa structure provided on a semi-insulating substrate. The stripe-mesa structure comprises an undoped light absorption layer sandwiched by cladding layers, and burying layers on the both sides. For this structure, a device capacitance is decreased to provide wide bandwidth and ultra-high speed operation properties. This device is applied to an optical modulator, an integrated type optical modulator, and an optical detector.