Stützelement eines automatischen Ladetisches einer Belichtungseinheit für Siliziumwafer,申请号DE19934339818-传众专利搜索

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发明名称	Stützelement eines automatischen Ladetisches einer Belichtungseinheit für Siliziumwafer
摘要
申请公布号	DE4339818(A1)	申请公布日期	1995.05.24
申请号	DE19934339818	申请日期	1993.11.23
申请人	PHILIPS PATENTVERWALTUNG GMBH, 20097 HAMBURG, DE	发明人	GAKIS, ANDREAS, 22399 HAMBURG, DE;BUSKAMP, RALPH, 22415 HAMBURG, DE
分类号	G03F9/00;G03F7/20;H01L21/027;H01L21/683;H01L21/687;(IPC1-7):H01L21/68	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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