| 摘要 |
PURPOSE:To improve the light utilization of an aligner, by converting the nonlinearly polarized light from a light source to a linearly polarized light, and irradiating a pattern with the linear polarization light. CONSTITUTION:The light entering a polarization light beam splitter 21 is divided into transmitted light (P polarization light polarized in the direction of paper surface) and reflected light (S polarization light polarized in the direction vertical to paper surface), by the light dividing surface of the polarization beam splitter 21. The P polarization light is directed to the light incidence surface of an optical integrator 7 via a polarization element 27. The S polarization light is converted to a P polarization light by a halfwave plate 22, and directed to the light incidence surface of the optical integrator 7 via a polarization element 24. Thus secondary light sources formed in the vicinity of a light emission surface of a fly-eye lens of the optical integrator 7 are all P polarization lights, so that the lights illuminating a reticle 11 are all P polarization lights. Thereby the loss of light penetrating the reticle is not generated, and flare is not generated. |
