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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH07126872(A)
申请公布日期
1995.05.16
申请号
JP19930292547
申请日期
1993.10.29
申请人
ANELVA CORP
发明人
OGAWARA YONEICHI
分类号
C23C16/50;C23F4/00;H01J5/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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