| 摘要 |
<p>PURPOSE:To quickly and smoothly extract remaining gas in the gas feed piping lines of a semi-conductor fabricating means and the like, particularly in piping lines in which a block valve is incorporated. CONSTITUTION:The device in which a block valve with a tank chamber is incorporated is made up of a gas feed passage 6 provided with an inlet and an outlet, a branch passage 7 which is communicated with the gas feed passage 6, and is provided with an outlet, a body 1 which is formed halfway to the branch passage 7, and is provided with a tank chamber 8, a first valve 2 which opens/closes the gas feed passage 6 at the downstream side of a place where connection to the branch passage 7 is made, and of a second valve 3 which opens/closes the branch passage 7 at the upstream side of the tank chamber 8.</p> |
