APPARATUS AND METHOD FOR ETCHING,申请号JP19930254299-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR ETCHING
摘要
申请公布号	JPH07111257(A)	申请公布日期	1995.04.25
申请号	JP19930254299	申请日期	1993.10.12
申请人	OLYMPUS OPTICAL CO LTD	发明人	UCHIYAMA HIDENORI
分类号	H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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