| 摘要 |
<p>PURPOSE:To sharpen a tip to increase field strength in the tip vicinity by forming a field emission type cathode by two processes of a deposit process for forming cathode bottom part and a process wherein conical top parts are to be deposited on the cathode bottom parts. CONSTITUTION:A cathode electrode 3 is parallelly arranged in the inner surface of a panel 1, and thereon a stripe-shape gate electrode 5 is arranged in parallel to the electrode 3 via an insulating layer 4 of SiO2 and the like. The electrode 5 and the layer 4 penetrate the oppositely crossing part of the respective cathode electrode and electrode 5 to boredly provide plural fine electron passing holes 6, and field emission type cathodes 7 having conical tips respectively are adherently formed on the electrode 3 in the holes 6. The cathodes 7 are formed by two process, different in material and a slit, etc., of a process wherein truncated conical cathode bottom parts 7B are depodited and a process wherein sharp conical top parts 7A composing the top parts on the cathode bottom parts 7B are deposited. Consequently the tips can be sharpened and also productivity can be improved.</p> |
