| 摘要 |
<p>PURPOSE:To reduce the size of an automatic substrate processing unit being used while enhancing the processing effect by setting the maximum dimension of a cassette in the direction parallel with the main surface of a substrate smaller than the outline dimension of the substrate in that direction. CONSTITUTION:A substrate holding cassette 20 is formed symmetrically in the longitudinal and lateral directions. The cassette 20 comprises four longitudinal basic supporting members 21 extending longitudinally in parallel, and a pair of planar side members 22 interposed between the end parts of each supporting member 21 and coupling the end parts with each other. The maximum dimension B1 of the cassette 20 in the direction parallel with the main surface of a substrate 2 being held is set smaller than the outline dimension D of the substrate 2. Since a downsized substrate holding cassette 20 is employed, the capacity of processing tank can be reduced.</p> |
