| 摘要 |
<p>PURPOSE:To enhance the throughput of an exposing unit by providing means for detecting the positional shift of a substrate held on a holding board and a driving means for shifting a moving tables based on the output therefrom thereby shortening the waiting time significantly. CONSTITUTION:The positioning unit comprises moving tables 3b, 3d reciprocative in a predetermined axial direction along a guide means 3f, and a holding board 3a supported thereby. The positioning unit further comprises means 3i for detecting the positional shift of a substrate W1 held on the holding board 3a, and driving means 3e, 3g for shifting the moving tables 3b, 3d based on the output therefrom. The detecting means 3i is supported by the moving tables 3b, 3d. This structure detects positional shift of the substrate W1 while shifting the moving tables 3b, 3d toward the guide means 3f and eliminates at least a part of the positional shift thus shortening the waiting time of a positioning unit significantly.</p> |
