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发明名称
DOPING METHOD
摘要
申请公布号
JPH0794427(A)
申请公布日期
1995.04.07
申请号
JP19930256338
申请日期
1993.09.21
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
UCHIUMI YUICHI;AKAZAWA MASAYOSHI
分类号
H01L21/205;H01L21/268;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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