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发明名称
METHOD FOR PULLING UP SINGLE CRYSTAL AND DEVICE THEREFOR
摘要
申请公布号
JPH0789791(A)
申请公布日期
1995.04.04
申请号
JP19930259293
申请日期
1993.09.22
申请人
MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP
发明人
ABE HIROSHIGE;ONO NAOKI;ARAI YOSHIAKI;KIDA MICHIO;FURUYA HISASHI
分类号
C30B15/14;C30B29/06;(IPC1-7):C30B15/14
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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