MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19930250950-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0786256(A)	申请公布日期	1995.03.31
申请号	JP19930250950	申请日期	1993.09.14
申请人	NIKON CORP	发明人	SUZUKI SATOSHI
分类号	H01L21/302;H01L21/3065;H01L27/14;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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