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发明名称
HIGH FREQUENCY INDUCTION HEAT PLASMA DEVICE WITH MONITORING MEANS
摘要
申请公布号
JPH0785991(A)
申请公布日期
1995.03.31
申请号
JP19930227515
申请日期
1993.09.13
申请人
AGENCY OF IND SCIENCE & TECHNOL;TOKYO UNIV;TOKYO ELECTRIC POWER CO INC:THE;NIPPON STEEL CORP;JEOL LTD
发明人
MIZUNO KOICHI;OUCHI HIDEO;YOSHIDA TOYONOBU;ASAKURA TOMOMI;UEMATSU NOBUYUKI;KOMAKI HISASHI
分类号
H05H1/00;H05H1/30;H05H1/46;(IPC1-7):H05H1/00
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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