ION SCATTERING SPECTROSCOPY AND APPARATUS FOR THE SAME

摘要

The present invention provides an improved ion scattering spectroscopy for analyzing a sample surface under ultra high vacuum comprising steps of irradiating an ion beam of a small mass number inert gas onto the sample surface, analyzing distribution of energy of ions scattered by the sample surface, irradiating an ion beam of a relatively large mass number inert gas onto the sample surface so as to remove one atomic layer from the sample surface, irradiating an ion beam of the small mass number inert gas to the newly exposed sample surface and analyzing distribution of energy of ions scattered at the newly exposed sample surface.