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发明名称	GAS FEED NOZZLE
摘要
申请公布号	JPH0778797(A)	申请公布日期	1995.03.20
申请号	JP19930224097	申请日期	1993.09.09
申请人	SUMITOMO METAL IND LTD	发明人	TANPO HITOSHI;AOYANAGI TSUTOMU
分类号	H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/304;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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