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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0778806(A)
申请公布日期
1995.03.20
申请号
JP19930222679
申请日期
1993.09.08
申请人
FUJI ELECTRIC CO LTD
发明人
GOTOU TOMOAKI
分类号
H01L21/302;B81B1/00;B81C1/00;H01L21/3065;H01L29/84;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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