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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH0778699(A)
申请公布日期
1995.03.20
申请号
JP19930247481
申请日期
1993.09.08
申请人
ANELVA CORP
发明人
HIRAYANAGI HIROHISA;NAKAMURA NOBORU
分类号
C23C16/50;C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46;H01L21/306
主分类号
C23C16/50
代理机构
代理人
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地址
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