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发明名称
摘要
申请公布号	JPH0715768(U)	申请公布日期	1995.03.17
申请号	JP19930052540U	申请日期	1993.08.23
申请人		发明人
分类号	C23C14/32;H01L21/203;H01L21/205;(IPC1-7):C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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