WAFER IN VACUUM CONVEYING DEVICE,申请号JP19930243883-传众专利搜索

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发明名称	WAFER IN VACUUM CONVEYING DEVICE
摘要
申请公布号	JPH0769406(A)	申请公布日期	1995.03.14
申请号	JP19930243883	申请日期	1993.09.03
申请人	DAIHEN CORP	发明人	YONEDA TOSHIO
分类号	B25J13/08;B25J15/06;B25J21/00;B65G1/00;B65G49/07;(IPC1-7):B65G1/00	主分类号	B25J13/08
代理机构		代理人
主权项
地址

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