| 摘要 |
PURPOSE:To facilitate the detaching work of a quartz tube from a process vessel which tube accommodates a temperature measuring means, and improve the temperature measurement precision of an object to be treated. CONSTITUTION:In a heat treatment equipment provided with a process vessel 26 for heat-treating an object W to be treated, a lid body 40 of the object W in the process vessel 26, and a temperature measuring means for measuring the temperature in the process vessel 26, a quartz tube 50 accommodating the temperature measuring means is almost vertically retained to be detachable in the process vessel 26 through a hole 40 formed in the lid body 40, and a retaining means 54 for maintaining the airtightness of the process vessel 26 is installed. |
