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发明名称
Erhöhung der Ätzgewschwindigkeit in fluorierten halogenkohlenstoff oxydierenden Plasmas mit chlorfluorierten kohlenstoffhaltigen zusätzen.
摘要
申请公布号
DE3852619(D1)
申请公布日期
1995.02.09
申请号
DE19883852619
申请日期
1988.10.31
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
DAUBENSPECK, TIMOTHY H., COLCHESTER VERMONT 05446, US;ICHISHITA, FAITH S., ESSEX JUNCTION VERMONT 05452, US
分类号
H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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