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发明名称
Termische Reaktoranlage zur Bearbeitung von Halbleiterscheiben und Betriebsverfahren eines solchem Reaktors.
摘要
申请公布号
DE69106285(D1)
申请公布日期
1995.02.09
申请号
DE19916006285
申请日期
1991.09.06
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
ADAMS, DAVID V., SAN JOSE, CALIFORNIA 95129, US;ANDERSON, ROGER N., SAN JOSE, CALIFORNIA 95124, US
分类号
C23C14/52;C23C16/48;C30B25/10;H01L21/205;H01L21/31;(IPC1-7):C23C16/48;B01J3/00
主分类号
C23C14/52
代理机构
代理人
主权项
地址
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