| 摘要 |
PURPOSE:To enable the spread of both a central wavelength and a wavelength spectrum to be changed freely with a single launcher by keeping the phase differences between the high frequency voltages being supplied to the antennas adjacent to each other in a specified relation, and then possessing a phase regulating means which is capable of varying each of the phase differences. CONSTITUTION:In a launcher for high-frequency injection, which is provided with antenna ranks 1, in which a plurality of antennas 11 for injecting a high-frequency power to the plasma are arranged, the phase difference between the high frequency voltages being supplied to adjacent antennas 11 is varied one after another in the direction the antenna ranks 1 extend. In addition, there is provided a phase regulating means 3, which keeps the difference of the phase difference between an antenna 11 and the antennas 11 placed on both sides thereof at not more than one fifth of the minimum phase difference among antenna ranks anywhere within the antenna ranks 1. Thereby, the spread of a central wavelength and a wavelength spectrum can be changed freely by way of only setting the phase regulator group 3 without making a change in the antenna ranks 1.
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