发明名称 METHOD FOR ANALYZING FLUID SHAPE
摘要 PURPOSE:To reduce the number of calculation points and to shorten a calculation time by representing plural molecules constituting a fluidized film or a substrate by one mass point, obtaining inter-molecule attraction to be mutual action between mass points to solve the motional equation of each mass point. CONSTITUTION:A calculation condition such as the physical properties of an object to be calculated is inputted to a computer. If a mass point of a film material is stuck to a plane, attraction applied to the mass point is obtained. Then mass points 5 for a fluid film material are uniformly generated on the surface of 6 a solidified film material based upon the number of mass points corresponding to a reaction generating speed, the diameter of each mass point and a generation pitch in each time step. Then the sum of attraction from the peripheral mass points of all mass points of the fluid film material is calculated. Then the equation of fluid motion is solved for all material points of the fluid film material. The surface shape of a solidified film material including newly stilled mass point is updated and the surface of the solidified film material and its internal mass points are updated based upon a surface position.
申请公布号 JPH0736855(A) 申请公布日期 1995.02.07
申请号 JP19930179619 申请日期 1993.07.21
申请人 HITACHI LTD 发明人 SAITO YOKO;HIRASAWA SHIGEKI
分类号 C30B25/16;G01N11/00;G06F17/00;G06F19/00;G06Q50/00;G06Q50/04;G06Q90/00;H01L21/00;H01L21/66 主分类号 C30B25/16
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