| 摘要 |
PURPOSE:To perform a lithography while discharging a thick film paste at a necessary time by starting, stopping the discharge of the paste while synchronizing with the movement of a nozzle corresponding to the type of the paste and the variation in a lithography speed. CONSTITUTION:A nozzle 10 for discharging thick film paste 9 and a sensor 13 disposed at a predetermined distance forwardly of a relatively moving direction of the nozzle can be accurately moved on a lithography trace designated with NC data. Further, even if the nozzle 10 and the sensor 13 are altered at the positions in the structure of a thick film circuit lithography apparatus, it can be coped with variation in the number of shifts at each operation unit. Further, in a thick film paste discharge control operation and a X-Y table moving control operation, it can be coped with the variation in a discharging timing in response to the variation in the type of the paste and the moving speed of the table 12. Thus, the paste on a desired lithography trace can be accurately provided on the basis of the NC data. |
