| 摘要 |
PURPOSE:To achieve shortening of manufacturing time and besides, to achieve improvement of positional precision of each component by a method wherein an area in which at least one part of a conductive material is oxidized is established to an electricity heat conversion material, and heat energy is generated in this area. CONSTITUTION:A film is formed by a material capable of being made into both a heating resistor and an electrode on a base material 5 of glass or the like. Then, a finished product other than a part made into the heating resistor and the electrode of a film 4 is coated by a resist 7. Then, the film of a part not coated by the resist 7' is converted to insulating matter by an anodic oxidation method, and thereafter, the resist 7' is peeled off. Then, photosensitive resin 8 is entirely laminated. Thereafter, the photosensitive resin 8 is processed by patterning by execution of partial exposure and development, and a hardened layer pattern 8' is formed. Then, a liquid path or the like are formed by laminating a top plate 6 of glass or the like onto the photosensitive resin hardened layer 8' specifying the liquid path, a discharge port, etc. Lastly, electrolytic solution containing electrolyte is put in a liquid chamber and the liquid path, and anodic oxidation is executed again. Thus, a film surface of a part which is not coated by the photosensitive resin hardened layer is converted to oxides to prepare the heating resistor. |
