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发明名称
PLASMA PRODUCING EQUIPMENT
摘要
申请公布号
JPH0729890(A)
申请公布日期
1995.01.31
申请号
JP19930193107
申请日期
1993.07.08
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SATO TAKEO
分类号
C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/306
主分类号
C23C16/50
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