| 摘要 |
The present invention relates to a floating-gate cell comprising a gate stacking (2-6), spacers (11) made of phosphorus-doped glass which are formed on the edges of the gate stacking, an insulating planarising layer (10) covering the whole of the structure, drain contact apertures (13) formed in the insulating planarising layer and not in the spacers. Preferably, the phosphorus-doped glass (PSG) contains 4 to 10 % by weight of phosphorus and the planarising layer is a layer of glass doped with boron and with phosphorus (BPSG). <IMAGE> |
