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发明名称
Particle beam apparatus.
摘要
申请公布号
EP0428906(B1)
申请公布日期
1995.01.25
申请号
EP19900120506
申请日期
1990.10.25
申请人
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH
发明人
FROSIEN, JUERGEN, DR.-ING.;SPEHR, RAINER, DR.
分类号
G01Q90/00;G01Q30/02;H01J37/12;H01J37/244;H01J37/252;(IPC1-7):H01J37/244
主分类号
G01Q90/00
代理机构
代理人
主权项
地址
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