| 摘要 |
PURPOSE:To make the setting position of a damper to prevent the damage on a detector owing to the radiation of electron beam, at an optimum position, in an electronic energy loss simultaneous detector. CONSTITUTION:In an electronic energy loss simultaneous detector composed of a permeation electron microscope, a magnetic field quadruple lens 18 for focus, a fragment magnetic field 10, a magnetic field quadruple lens 11 for distribution zoom, and a plane detector 12, a deflector 13 to deflect in the vertical direction to the distribution direction is provided at the front side of the magnetic field quadruple lens 18 for focus. Furthermore, a slit 15 to remove the deflected electron is provided near the magnetic field quadruple lens 11 for distribution zoom. By separating the deflector 13 far from the plane detector 12, the deflecting field can be moderated. As a result, a disturbance to the detector by the deflecting field, or a noise by the scattered electrons can be reduced. And the design can be made compact, and the assembly and the maintenance can be made easily.
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