发明名称 Die bond touch down detector
摘要 A die bond touch down detector (20) includes a strain gauge circuit (22) having a plurality of strain gauges (12) formed into a wheatstone bridge configuration. The strain gauges (12) are mounted on a die bond head (10) and measure and detect deformations of the die bond head (10). The strain gauge circuit (22) generates a differential output signal in response to deformations detected by the strain gauges (12). The differential output signal is amplified, filtered, and converted to digital format for processing by a microcontroller (36). The microcontroller (36) performs calibration, display formatting, and touch down signal generation. The die bond touch down detector (20) provides real time monitorization, automatic calibration, and real force applied information for the die bond head (10).
申请公布号 US5608172(A) 申请公布日期 1997.03.04
申请号 US19950405332 申请日期 1995.03.16
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DE MAGALHAES MACHADO, RICARDO J. S.;CARDOSO, ANDRE G. M.
分类号 G01B21/32;G01L5/00;H01L21/52;(IPC1-7):G01L1/00 主分类号 G01B21/32
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