| 摘要 |
PURPOSE:To easily perform with a single working process a complex machining which is different in the depth direction. CONSTITUTION:A mask member 104 is constituted by combining photosensitive glass 104a that has an opening part and a metal mask 104b; the transmissivity of a laser beam in the mask member 104 is partially changed; a distribution is provided in the energy strength in the machining part; and thereby machining is performed which is different in the depth direction. Consequently, a fine and complex machining is easily performed, and a high precision, mass production of minute parts, and low cost are made possible. |
